EMS150T的機(jī)殼是整體成型的，結(jié)構(gòu)堅(jiān)固耐用，配有氣冷的70L/S的渦輪分子泵，自動(dòng)進(jìn)氣控制保證了濺射期間最佳的真空水平，真空腔室直徑為165mm并帶有防爆裝置。EMS150T具有“真空閉鎖”功能，可在設(shè)備不工作時(shí)維持腔室的真空度，從而保證高真空的性能。
EMS150T系列全自動(dòng)高真空離子濺射/熱蒸發(fā)一體化鍍膜儀給用戶以類似傻瓜相機(jī)的簡單操作、頂級(jí)的鍍膜質(zhì)量和對(duì)熟手/新手都很理想的用戶界面，讓用戶真正領(lǐng)略至臻完美的鍍膜品質(zhì)！
根據(jù)不同的應(yīng)用方向，EMS150T細(xì)分為三個(gè)型號(hào)：
l EMS150TS：高分辨率濺射鍍膜儀High Resolution Turbomolecular Pumped Sputter Coater，可濺射易氧化和不易氧化金屬，可選各種濺射靶材，包括場發(fā)射電鏡常用的銥和鉻。
l EMS150TE：高真空鍍碳儀，可制作高穩(wěn)定的碳膜和表面覆形膜，是TEM應(yīng)用最理想的選擇。
l EMS150TES：集合了離子濺射和熱蒸鍍兩種真空沉積鍍膜方式，鍍膜頭可在幾秒內(nèi)快速更換，只能邏輯系統(tǒng)自動(dòng)識(shí)別所裝的鍍膜頭類型，并顯示相應(yīng)的操作模式。
注：上述各型號(hào)都可配備如下可選的附件：金屬蒸鍍、碳絲蒸鍍、膜厚測量等
觸摸屏控制：
EMS150T操作十分簡單，直觀的觸摸屏，即使最不熟練的操作者也可以自由操作，同時(shí)可方便的鍵入和存儲(chǔ)數(shù)據(jù)。為了方便使用，設(shè)備中已經(jīng)預(yù)存一些了典型的濺射和蒸發(fā)鍍膜參數(shù)資料。
鍍膜插入頭選項(xiàng)：
l 具有一系列可互換、即插即用的鍍膜插入頭
l 濺射插入頭適用于易氧化和不易氧化金屬材料，直徑57mmX0.3mm厚鉻靶為標(biāo)準(zhǔn)靶材，可用另外的濺射插入頭來快速更換鍍膜材料（僅為TS和TES型號(hào)）
l 適用于3.05mm碳棒蒸發(fā)插入頭
l 適用于6.15mm碳棒蒸發(fā)頭，建議使用3.05mm直徑的碳棒，它們更容易控制、更經(jīng)濟(jì)
l 碳絲蒸發(fā)插入頭
l 金屬蒸發(fā)和光闌潔凈頭，包括向上蒸發(fā)或向下蒸發(fā)（僅為TE和TES型號(hào)）
樣品臺(tái)選項(xiàng)：
l EMS150T具有各種易更換的樣品臺(tái)，drop-in落入式設(shè)計(jì)具高度可調(diào)（除旋轉(zhuǎn)行星臺(tái)）。
l 標(biāo)準(zhǔn)配置為旋轉(zhuǎn)臺(tái), 直徑為50mm
l 可預(yù)設(shè)傾斜角度的旋轉(zhuǎn)臺(tái)（可選）
l 可變角度旋轉(zhuǎn)行星臺(tái)（可選）
l 可用于4〞晶圓的平面旋轉(zhuǎn)臺(tái)（可選）
l 顯微鏡載玻片樣品臺(tái)（可選）
其它選項(xiàng)：
l 用于高樣品的加高腔室
l 膜厚監(jiān)測器（FTM）
l 用于測量低和高真空的全范圍真空計(jì)
特點(diǎn)和優(yōu)點(diǎn):
l 金屬濺射或碳蒸發(fā)或兩者兼?zhèn)洌阂惑w化設(shè)計(jì)，節(jié)約空間
l 精細(xì)顆粒濺射：高分辨率場發(fā)射掃描電鏡（FE-SEM）制樣的精細(xì)鍍膜應(yīng)用
l 渦輪分子泵高真空系統(tǒng)：允許不氧化貴金屬和易氧化其它金屬靶材的濺射鍍膜，大大拓寬了可濺射靶材范圍，既適合普通SEM、高分辨率FE-SEM鍍膜制樣應(yīng)用，也為許多薄膜應(yīng)用等材料科研領(lǐng)域提供理想的鍍膜平臺(tái)
l 全自動(dòng)觸摸屏控制：快速數(shù)據(jù)輸入，簡單操作
l 可儲(chǔ)存多個(gè)客戶自定義鍍膜方案：對(duì)多用戶實(shí)驗(yàn)室十分理想
l 與鍍膜過程和鍍膜材料相匹配的預(yù)編程自動(dòng)真空控制
l 精細(xì)的厚度控制：使用膜厚監(jiān)控選項(xiàng)
l “智能”式系統(tǒng)識(shí)別：自動(dòng)感知用戶所裝的插入式鍍膜頭的類型
l 高真空碳蒸鍍：對(duì)SEM和TEM鍍碳膜應(yīng)用非常理想
l 蒸發(fā)電流波形控制
l Drop-in落入式快換樣品臺(tái)（標(biāo)配旋轉(zhuǎn)臺(tái)）
l 真空閉鎖功能：可讓工作腔室處于真空狀態(tài)，改善后續(xù)真空效果，或在真空條件下保存樣品
l 鍍制厚膜能力：一次真空條件下的濺射時(shí)間可長達(dá)60分鐘（材料科研領(lǐng)域的應(yīng)用）
l 人體工程學(xué)設(shè)計(jì)的整體成型機(jī)殼：易維護(hù)和易拆裝
l 帶有本地FTP服務(wù)器連接的以太網(wǎng)端口：簡單的程序更新
l 設(shè)有功率因素補(bǔ)償，有效利用電能，降低運(yùn)行成本
l 符合當(dāng)前電器法規(guī)（CE認(rèn)證）
EMS150T儀器參數(shù)：
|
儀器尺寸 |
585mm寬*470mm*410mm高(總高650mm) |
|
重量 |
33.4KG |
|
工作腔室 |
150mm（內(nèi)徑）*127mm（高）硼硅酸鹽玻璃腔室，并帶整體安全防護(hù)罩 |
|
觸摸屏用戶界面 |
帶有觸摸按鈕的全圖像界面，包含多達(dá)十個(gè)鍍膜程序，可提醒何時(shí)需要維護(hù) |
|
工作腔室 |
150mm（內(nèi)徑）*127mm（高）硼硅酸鹽玻璃腔室，并帶整體安全防護(hù)罩 |
|
樣品臺(tái) |
轉(zhuǎn)速為8-20rpm的旋轉(zhuǎn)臺(tái) |
|
真空系統(tǒng) |
渦輪子分子泵：帶有內(nèi)部空氣卻的渦輪分子泵，抽速為70L/s 旋轉(zhuǎn)機(jī)械泵：抽速為50L/m的兩級(jí)旋轉(zhuǎn)機(jī)械泵，帶有油污過濾器 |
|
真空測量 |
皮拉尼真空計(jì)作為標(biāo)配 |
|
極限真空度 |
10-5mbar兩級(jí) |
|
電源需求 |
90-250V~50/60Hz 1400VA（ 包括旋轉(zhuǎn)機(jī)械泵電壓240V） |
|
氣體 |
濺射工作氣體氬氣，99.999%（TS和TES版本）；氮?dú)猓艢馄普婵諝怏w（可選） |
|
金屬蒸發(fā)和光闌清潔頭 |
用于源自鎢絲籃或舟的金屬熱蒸發(fā)。可配備一個(gè)標(biāo)準(zhǔn)鉬舟用于清潔SEM或TEM光闌 |
|
碳蒸發(fā) |
穩(wěn)定的無紋波直流電源控制的脈沖蒸發(fā)，確保源自碳棒或碳絲的可重復(fù)蒸碳 |
|
電流脈沖 |
1-90安培 |
|
濺射 |
0-150mA。可預(yù)設(shè)膜厚（需FTM選項(xiàng)）或使用內(nèi)置定時(shí)器 |
|
濺射工作真空范圍 |
5*10-3到5*10-1mbar |
|
濺射靶材和碳耗材供應(yīng) |
EMS150TS和EMS150TES標(biāo)配鉻靶，但可選用的其它靶材范圍很寬，包括那些廣泛用于SEM制樣的靶材，如：Au金靶，Au/pd金鈀，Pt鉑靶，和Iridium銥靶。對(duì)非SEM應(yīng)用，可選用的靶材包括：AI鋁，Ta鉭，ITO氧化銦錫，F(xiàn)e鐵，W鎢，Ti鈦，等等：碳制品包括高純度碳棒和碳絲纖維 |
儀器選購：
|
貨號(hào) |
產(chǎn)品名稱 |
|
3390 |
EMS150T E Turbomolecular pumped carbon evaporator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation insert for 3.05mm Ø carbon rods. Supplied with carbon rods (3.05mm Ø x 300mm) and a carbon rod shaper (manual operation) |
|
3380 |
EMS150T S - High resolution turbomolecular pumped sputter coater, including a 54mm Ø x 0.3mm chromium target |
|
3400 |
EMS150T ES - High-resolution turbomolecular pumped sputter coater, including a 57mm Ø x 0.3mm chromium target and high vacuum carbon rod evaporation coater for 3.05mm Ø carbon rods. |
|
91003 |
Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter |
可選配件：
|
貨號(hào) |
產(chǎn)品名稱 |
|
3200 |
Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54mm x 0.3mm thick chromium target as standard. For additional targets see Sputtering Targets section |
|
3210 |
Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly. |
|
3230 |
Carbon rod evaporation head insert (for 3.05mm Ø rods) |
|
3240 |
Carbon rod evaporation head insert (for 6.15mm Ø rods). Note that EMS recommends 3.05mm Ø rods as they offer greater process control and are more economical (less wastage). |
|
3250 |
Carbon fiber evaporation head insert |
|
3260 |
metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards (T E and T ES |
|
3270 |
Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens |
|
3280 |
Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS150T when bench depth is limited |
|
3290 |
Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited |
|
3300 |
Spare quartz crystals. Pack of three |
|
3320 |
Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard) |
|
4513 |
Glow discharge insert to modify surface properties (eg hydrophobic to hydrophilic conversion) or to clean surface residues (TS and T ES only). Can be retrofitted |
|
3600 |
metal evaporation basket - pack of 10 (for use with metal evaporation head) |
|
3610 |
Two-year spares kit for EMS150T S |
|
3620 |
Two-year spares kit for EMS150T E |
|
3630 |
Two-year spares kit for EMS150T ES |
樣品臺(tái)選件;
|
貨號(hào) |
產(chǎn)品名稱 |
|
3330 |
Rotation stage, 50mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment |
|
3340 |
Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37mm-60mm). Tilt angle can be pre-set. 50mm Ø specimen platform with six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm |
|
3350 |
Variable angle “Rotacota” rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm |
|
3360 |
Flat rotation specimen stage for 100mm / 4” wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm |
|
3370 |
Rotating specimen stage for glass microscope slides (up to two x 75mm x 25mm slides). Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used |
濺射靶材和碳耗材選項(xiàng)：
|
貨號(hào) |
產(chǎn)品名稱 |
|
3410 |
57mm Ø x 0.1mm Gold |
|
3411 |
57mm Ø x 0.1mm Gold/Palladium (80/20) |
|
3412 |
57mm Ø x 0.1mm Platinum |
|
3413 |
57mm Ø x 0.1mm Nickel |
|
3414 |
57mm Ø x 0.1mm Silver |
|
3415 |
57mm Ø x 0.1mm Palladium |
|
3416 |
57mm Ø x 0.1mm Copper |
|
3417 |
57mm Ø x 0.3mm Chromium |
|
3418 |
57mm Ø x 0.5mm Tungsten |
|
3419 |
57mm Ø x 1.5mm Chromium |
|
3420 |
57mm Ø x 0.2mm Tungsten |
|
3421 |
54mm Ø x 1.5mm Carbon |
|
3422 |
57mm Ø x 0.1mm Aluminium |
|
3423 |
57mm Ø x 0.1mm Platinum/Palladium (80/20) |
|
3424 |
57mm Ø x 1.5mm Titanium |
|
3425 |
57mm Ø x 0.3mm Platinum/Palladium (80/20) |
|
3426 |
57mm Ø x 0.3mm Gold |
|
3427 |
57mm Ø x 0.3mm Gold/Palladium (80/20) |
|
3428 |
57mm Ø x 0.3mm Platinum |
|
3429 |
57mm Ø x 0.5mm Titanium |
|
3430 |
57mm Ø x 0.1mm Iron |
|
3431 |
57mm Ø x 0.3mm Iridium |
|
3432 |
57mm Ø x 0.1mm Cobalt |
|
3433 |
57mm Ø x 0.1mm Tin |
|
3434 |
57mm Ø x 0.1mm Molybdenum |
|
3435 |
57mm Ø x 0.3mm Magnesium |
|
3436 |
57mm Ø x 0.1mm Tantalum |
|
3437 |
57mm Ø x 3mm Indium Tin Oxide (90/10) |
|
3500 |
Carbon rods – 6.15mm Ø x 100mm length (unshaped) pack of 10 |
|
3510 |
Carbon rods – 6.15mm Ø x 50mm length (shaped) pack of 10 |
|
3520 |
Carbon rods - 3.05mm Ø x 50mm length (shaped) pack of 10 |
|
3530 |
Carbon rods 3.05mm Ø x 300mm length (unshaped) pack of 10 |
|
3540 |
Carbon fibre cord - high purity - 1m |
|
3550 |
Carbon fibre cord - high purity - 5m |
|
3560 |
Carbon fibre cord - standard grade - 1m |
|
3570 |
Carbon fibre cord - standard grade - 10m |
|
3580 |
Carbon fibre cord - standard grade - 100m |
|
3590 |
Manual rod shaper for 6.15mm Ø carbon rods |
|
3595 |
Manual rod shaper for 3.05mm Ø carbon rods |