新一代鍍膜儀-EMS150R 型鍍膜儀（真空鍍膜儀/噴碳儀/蒸鍍儀）采用最新技術(shù)研制而成，彩色觸摸液晶屏，快速的參數(shù)輸入，數(shù)種碳絲匹配，友好的用戶界面，帶給你不一般的操作感受！
提供3個(gè)版本的儀器：
l EMS150R S-噴金儀/離子濺射儀（適用于真空噴鍍非氧化型金屬，如金，鉑，鈀等）
l EMS150R E-噴碳儀/碳蒸鍍儀（適用于真空噴鍍碳膜，特別適用于SEM，用碳絲或碳繩）
l EMS150R ES-真空鍍膜儀（離子濺射儀和碳蒸鍍儀的結(jié)合體）
EMS150R是一款多功能緊湊型機(jī)械泵抽真空鍍膜系統(tǒng)，對(duì)于SEM樣品制備及其它鍍膜應(yīng)用非常理想。直徑為165mm的腔室可容納多種需要鍍膜的樣品，在SEM應(yīng)用中提高成像質(zhì)量。
EMS150R ES這個(gè)雙重用途、結(jié)構(gòu)緊湊、機(jī)械泵抽真空的鍍膜系統(tǒng)可提供無(wú)與倫比的多用途鍍膜,其標(biāo)配有濺射插入頭和碳絲蒸發(fā)插入頭?？焖?、易更換的鍍膜插入頭，能在同一個(gè)緊湊設(shè)計(jì)中實(shí)現(xiàn)金屬濺射、碳蒸鍍和輝光放電三者之間的快速轉(zhuǎn)換。注意，輝光放電選項(xiàng)限EMS150R S和EMS150R ES可用，它可實(shí)現(xiàn)樣品表面改性（如疏水表面改為親水表面）。
采用全自動(dòng)觸摸屏控制,可快速輸入數(shù)據(jù)。自動(dòng)放氣控制功能確保了濺射期間最佳的真空狀態(tài)，可提供良好的一致性和可重復(fù)性。
智能識(shí)別系統(tǒng)可自動(dòng)探測(cè)安裝了何種類型的鍍膜插入頭，立即運(yùn)行相應(yīng)的鍍膜方案。可存儲(chǔ)多個(gè)用戶自定義的鍍膜方案，這對(duì)于需更改鍍膜參數(shù)實(shí)現(xiàn)不同應(yīng)用的多用戶實(shí)驗(yàn)室非常理想。多種樣品臺(tái)組件適用于各種尺寸和類型的樣品；所有樣品臺(tái)都具有快速、易更換及落入式設(shè)計(jì)的特點(diǎn)。
可預(yù)編程的鍍膜參數(shù)及方案確保結(jié)果一致，具有可重復(fù)性。設(shè)計(jì)先進(jìn)的碳蒸鍍插入頭操作簡(jiǎn)單,具有對(duì)蒸發(fā)電流參數(shù)的完全控制，確保了SEM應(yīng)用中一致的和可重復(fù)的碳沉積?？蛇x的膜厚監(jiān)控附件用于可重復(fù)的膜厚控制。
濺射、碳蒸鍍、輝光放電插入頭及多種可選件，使EMS150R對(duì)于多用戶實(shí)驗(yàn)室應(yīng)用非常理想?？蔀R射一系列非氧化性金屬，如金、銀、鉑和鈀等等。碳絲蒸鍍插入頭處理樣品速度非?？?。也可選用碳棒蒸發(fā)。還可應(yīng)用于金屬薄膜研究及電極的應(yīng)用。
濺射靶材或碳蒸發(fā)源的選用：
l 金：常規(guī)SEM應(yīng)用時(shí)使用最普遍的靶材；濺射速度快且導(dǎo)電效果最好。
l 銀 ：高導(dǎo)電性且具有高的二次電子發(fā)射率。濺射上去的銀易于去除，可使樣品成像后還原到其原來(lái)狀態(tài)。
l 鉑 ：在機(jī)械泵抽真空的濺射鍍膜系統(tǒng)中它的顆粒尺寸最小，且具有優(yōu)良的二次電子發(fā)射能力。
l 鈀：用于x射線能譜分析非常理想，因其譜線分布沖突相對(duì)較低。
l 金/鈀合金（80:20%）：通過(guò)限制沉積期間金顆粒的團(tuán)聚，鈀可提高最終分辨率。
l 碳絲蒸鍍：碳絲蒸鍍過(guò)程的閃蒸特性及快速更換碳絲的能力，使其處理樣品速度非?？?。
l 碳棒蒸發(fā)：用于需要減慢速度但可控性更好的蒸發(fā)過(guò)程，可制備更趨向無(wú)定形的碳膜。
EMS150R S：
|
貨號(hào) |
產(chǎn)品名稱 |
規(guī)格 |
|
4500 |
EMS150R S Rotary pumped sputter coater, includes an 57mm Ø x 0.1mm gold target |
1 |
|
4501 |
Quick-release sputter insert for EMS150R S and EMS150R ES – suitable for non-oxidising (noble) metals. Supplied with A 57mm Ø x 0.1mm thick gold target as standard. For additional noble metal targets (eg Platinum, Gold / Palladium, Silver) see Sputtering Targets section |
1 |
|
4502 |
Rotation stage, 50mm Ø with adjustable height for target to sample distances of 38mm-79mm (supplied with 2 mounting pillars). Note: this stage does not tilt – for tilting stage see Specimen Stages section |
1 |
EMS150R E：
|
貨號(hào) |
產(chǎn)品名稱 |
規(guī)格 |
|
4503 |
EMS150R E Rotary pumped carbon fibre evaporator, supplied with carbon fibre / cord |
1 |
|
4504 |
Quick-release carbon fibre evaporation insert for EMS150R E and EMS150R ES – suitable for evaporation of carbon fibre and carbon cord |
1 |
|
4506 |
Rotation stage, 50mm Ø with adjustable height for target to sample distances of 38mm-79mm (supplied with 2 mounting pillars). Note: this stage does not tilt – for tilting stage see Specimen Stages section |
1 |
EMS150R ES：
|
貨號(hào) |
產(chǎn)品名稱 |
規(guī)格 |
|
4507 |
EMS150R ES Rotary pumped sputter coater, includes an 57mm Ø x 0.1mm gold target, and carbon fibre evaporator, supplied with carbon fibre / cord |
Each |
|
4508 |
Quick-release sputter insert for EMS150R S and EMS150R ES – suitable for non-oxidising (noble) metals. Supplied 57mm Ø x 0.1mm thick gold target as standard. For additional noble metal targets (eg Platinum, Gold / Palladium, Silver) see Sputtering Targets section |
Each |
|
4509 |
Quick-release carbon fibre evaporation insert for EMS150R E and EMS150R ES – suitable for evaporation of carbon fibre and carbon cord |
Each |
|
4510 |
Rotation stage, 50mm Ø with adjustable height for target to sample distances of 38mm-79mm (supplied with 2 mounting pillars). Note: this stage does not tilt – for tilting stage see Specimen Stages section |
Each |
可選配件：
|
貨號(hào) |
產(chǎn)品名稱 |
規(guī)格 |
|
4511 |
Additional sputter insert for quick metal change (R S and R ES only). Note: this is an entire sputtering assembly; individual noble metal targets can also be purchased |
Each |
|
4512 |
Carbon rod evaporation insert for 3.05mm Ø rods (R E and R ES only). Includes manual rod shaper and 3.05mm Ø carbon rod |
Each |
|
4513 |
Glow discharge insert to modify surface properties (eg hydrophobic to hydrophilic conversion) or to clean surface residues (R S and R ES only). Can be retrofitted |
Each |
|
4515 |
Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens |
Each |
|
4516 |
Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the ems150R when bench depth is limited |
Each |
|
4517 |
Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This „modification? is used to measure and control the thickness of material deposited |
Each |
|
4518 |
Spare quartz crystal |
Each |
備選樣品臺(tái)Specimen stages
|
貨號(hào) |
產(chǎn)品名稱 |
規(guī)格 |
|
4519 |
50mm Ø rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37mm-60mm). Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm |
Each |
|
4520 |
90mm Ø rotating specimen stage for glass microscope slides (up to two x 75mm x 25mm slides). Stage rotation speed variable between 8 and 20rpm |
Each |
|
4521 |
Variable angle “Rotacota” rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm |
Each |
|
4522 |
Flat rotation specimen stage for 100mm / 4” wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm |
Each |
靶材系列：
|
貨號(hào) |
產(chǎn)品名稱 |
規(guī)格 |
|
4538 |
Carbon fibre cord - high purity - 1m |
|
|
4539 |
Carbon fibre cord - high purity - 5m |
|
|
4540 |
Carbon fibre cord - standard grade - 1m |
|
|
4541 |
Carbon fibre cord - standard grade - 10m |
|
|
4542 |
Carbon fibre cord - standard grade - 100m |
|
|
4543 |
Carbon rods - 3.05mm Ø x 50mm length (shaped) pack of 10 |
|
|
4544 |
Carbon rods 3.05mm Ø x 300mm length (unshaped) pack of 10) |
|
|
4546 |
Manual rod shaper for 3.05mm Ø carbon rods |
|
|
4523 |
57mm Ø x 0.1mm Gold |
1 |
|
4524 |
57mm Ø x 0.2mm Gold |
1 |
|
4525 |
57mm Ø x 0.3mm Gold |
1 |
|
4526 |
57mm Ø x 0.1mm Gold/Palladium (80/20%) |
1 |
|
4527 |
57mm Ø x 0.2mm Gold/Palladium (80/20%) |
1 |
|
4528 |
57mm Ø x 0.3mm Gold/Palladium (80/20%) |
1 |
|
4529 |
57mm Ø x 0.1mm Platinum |
1 |
|
4530 |
57mm Ø x 0.2mm Platinum |
1 |
|
4561 |
57mm Ø x 0.3mm Platinum |
1 |
|
4532 |
57mm Ø x 0.1mm Nickel |
1 |
|
4533 |
57mm Ø x 0.1mm Silver |
1 |
|
4534 |
57mm Ø x 0.1mm Palladium |
1 |
|
4535 |
57mm Ø x 0.1mm Copper |
1 |
|
4536 |
57mm Ø x 0.1mm Platinum/Palladium (80/20%) |
1 |
|
4537 |
57mm Ø x 0.3mm Platinum/Palladium (80/20%) |
1 |
備注：EMS 450型鍍碳儀（真空鍍膜儀/噴碳儀/蒸鍍儀）已經(jīng)不再供貨！