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大范圍高精度掃描探針顯微鏡 安捷倫5500LS
Specifications
• Stage
- Standard vacuum chuck size: 150 mm
- Sample thickness: up to 35 mm
- Examination area: 150 mm x 150 mm
- Fully motorized, controlled optics
- Optical resolution: 2 μm
Compatibility
• Compatible with Agilent 5 series family
of products and all AC modes
• Compatible with multi-purpose scanners
• Compatible with CSAFM, STM,
and EFM/MFM
• Compatible with imaging in air and
fluids, including but not limited to life sciences,
electrochemistry, and corrosion applications
• Compatible with temperature control
(-30oC to 250oC)
S c a n n e rs
• Large Scanner
- Scanning range: 100 μm x 100 μm
- Z range: 7 μm
- Vertical noise: 0.5Å RMS
• Small Scanner
- Scanning range: 10 μm x 10 μm
- Z range: 2 μm
- Vertical noise: <0.1Å RMS
安捷倫大樣品臺原子力顯微鏡可以快速、準(zhǔn)確地實現(xiàn)針尖定位和樣品定位。高精度的馬達(dá)驅(qū)動能幫助您自動準(zhǔn)確定位到您感興趣的區(qū)域,同時帶有記憶功能,可以自動迅速而準(zhǔn)確地回到原來每個樣品表面成像的位置,便于進行更多的深入研究。同時5500LS能很好地滿足大樣品在空氣、液體和溫度控制下成像。
優(yōu)勢
自動的光學(xué)縮放與聚焦,使用簡單方便
大范圍內(nèi)準(zhǔn)確定位,分辨率優(yōu)于2µm
150mm真空吸盤(標(biāo)準(zhǔn)),可安放6英寸晶片
可提供8英寸大夾具的選件,以適應(yīng)更大的樣品尺寸
應(yīng)用
半導(dǎo)體:Si晶片、器件
數(shù)據(jù)存儲材料:CDs、DVDs、硬盤等等